Q: Do you have any references to "gate leakage" vs. CMOS process technology? A: I typed "gate oxide leakage Semiconductor Industry Association" into Google and received plenty of useful hits. The Semiconductor Industry Association produces useful technology roadmaps, both near-term and far-term. You may instead type "SIA" as a substitute for the "Semiconductor Industry Association". Note that manufacturers of high-end microprocessors such as Intel, IBM, TI, Motorola, AMD, etc are usually at least one technology generation ahead of the TSMC and UMC's of the world and so "130nm" oxides for the microprocessor heavyweights will look more like the 90nm gate oxide thickness values in the SIA roadmap. On the web, I found several useful charts for gate oxide leakage vs. gate voltage for various oxide thicknesses.